1.0CanTops 网站https://cantops.com/chnbskimhttps://cantops.com/chn/author/bskim/FOUP 检测传感器 - CanTops 网站rich600338<blockquote class="wp-embedded-content" data-secret="TMs0qFMeLA"><a href="https://cantops.com/chn/product-menu/foup-sensor/">FOUP 检测传感器</a></blockquote><iframe sandbox="allow-scripts" security="restricted" src="https://cantops.com/chn/product-menu/foup-sensor/embed/#?secret=TMs0qFMeLA" width="600" height="338" title="“FOUP 检测传感器” — CanTops 网站" data-secret="TMs0qFMeLA" frameborder="0" marginwidth="0" marginheight="0" scrolling="no" class="wp-embedded-content"></iframe><script>
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http://cantops.com/chn/wp-content/uploads/sites/15/2023/05/Mini-FOUP-Sensor-800.jpg800800FOUP Senser是安装在半导体线设备中的Load Port或STB, Stocker等上，接触式检测是否有Wafer Carrier (FOUP/FOSB/POD/MAC)的传感器。由于是接触式检测，不受环境光噪音或电磁波噪音等影响，可以稳定地检测物体有无，采用内部传感器光学方式，保证500万次以上的使用寿命。